Non-contact pneumatic transfer for stages with small motion

Details Non-contact pneumatic transfer for stages with small motion Non-contact pneumatic transfer for stages with small motion

2008-05-20

2008-05-20

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

07375800

ABSTRACT:
Methods and apparatus for enabling a fine stage to be moved using pneumatics such that disturbances associated with a pneumatic transfer system are not transmitted to the fine stage are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage, a second stage, and a pneumatic transfer system. The pneumatic transfer system includes at least one transfer mechanism and a transfer block. The transfer mechanism is substantially directly coupled be coupled between the first stage and the transfer block, and the first stage provides a flow through the transfer mechanism to the transfer block. The transfer block is arranged to be positioned over a surface of the second stage to provide the flow to the second stage substantially without contacting the second stage.

REFERENCES:
patent: 6603130 (2003-08-01), Bisschops et al.
patent: 2001/0052970 (2001-12-01), Sato
patent: 2005/0024621 (2005-02-01), Korenaga
patent: 2005/0248744 (2005-11-01), Shibazaki

Affiliated with

Also associated with

Rating

Non-contact pneumatic transfer for stages with small motion does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Non-contact pneumatic transfer for stages with small motion, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Non-contact pneumatic transfer for stages with small motion will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2791772