Non-contact pick-up head

Details Non-contact pick-up head Non-contact pick-up head

1991-06-17

1992-12-08

Focarino, Margaret A.

Handling: hand and hoist-line implements

Utilizing fluid pressure

By positive fluid stream directed against article

271 97, B25J 1506

Patent

active

051691965

ABSTRACT:
A pick-up tool or pick-up head is provided for picking up semiconductor objects. The active face of the pick-up tool is provided with an outer plenum which extends around the peripheral edges of the object to be picked up and further includes an inner plenum formed in the center of the pick-up tool over the object to be picked up. A partial vacuum is applied to the inner plenum and compressed air is supplied to the outer plenum which flows over a support ridge separating the inner plenum from the outer plenum. The air flowing over the ridge generates a thin air film supporting layer so that the object being picked up by the pick-up tool is supported on the air film and levitated separate and apart from the pick-up tool.

REFERENCES:
IBM Technical Disclosure Bulletin; Oct., 1979; vol. 22 No. 5.
IBM Technical Disclosure Bulletin; Jan., 1980; vol. 22 No. 8a.

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