Non-contact optical glide tester

Details Non-contact optical glide tester Non-contact optical glide tester

1997-02-07

1998-10-06

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, 356359, G01B 902

Patent

active

058185925

ABSTRACT:
A non-contact optical method and apparatus for use in inspecting and measuring defects on a disk. The apparatus generates an interference pattern from a reference beam reflected from a surface of a transparent slider with a second beam reflected from a surface of a test disk. The resulting interference pattern is processed by a set of photodetectors and processing electronics to quantify and map the location and magnitude of asperities on the disk.

REFERENCES:
patent: 5486924 (1996-01-01), Lacey
patent: 5504571 (1996-04-01), Eckerman et al.

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