Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2007-06-12
2007-06-12
Nguyen, Vinh P. (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S750010
Reexamination Certificate
active
11210093
ABSTRACT:
Corona charges are used to bias a wafer to push down mobile charges and then pull them up during temperature cycles. Mobile charge is measured from the drops in the corona voltage due to the mobile charges. Corrections are made in the measurements for dipole potentials, leakage and silicon band-bending.
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Fung Min-Su
Horner Gregory S.
Howland William H.
Verkuil Roger L.
KLA-Tencor Corporation
Nguyen Vinh P.
Pearne & Gordon LLP
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