Non-contact method and apparatus for on-line interconnect...

Details Non-contact method and apparatus for on-line interconnect... Non-contact method and apparatus for on-line interconnect...

2006-08-08

2006-08-08

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S719000, C324S1540PB

Reexamination Certificate

active

07088121

ABSTRACT:
A system that facilitates non-invasive in-line characterization of parameters of VLSI circuit interconnects is provided. A plurality of micro-electro-mechanical system (MEMS) cantilevers apply voltage(s) to VLSI circuit interconnect(s) without physical contact thereto. A measuring component measures deflection characteristics of the cantilevers, the deflection(s) correspond to electrical forces generated from the applied voltage(s) as passed through VLSI circuit interconnect(s). A component computes characteristics of the VLSI interconnect based at least in part upon the measured deflection characteristics.

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