Non-contact method and apparatus for measurement of sheet...

Details Non-contact method and apparatus for measurement of sheet... Non-contact method and apparatus for measurement of sheet...

2006-03-28

2006-03-28

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

Reexamination Certificate

active

07019513

ABSTRACT:
A contactless sheet resistance measurement apparatus and method for measuring the sheet resistance of a surface p-n junction and its leakage current is disclosed. The apparatus comprises an alternating light source optically coupled with a transparent and conducting electrode brought close to the junction, a second electrode placed outside of the illumination area, and a third grounded electrode surrounding the first and second electrodes. For measurements of junction capacitance, a calibration wafer with known sheet resistance is used to provide reference photovoltage signals. Using the measurement of the junction photovoltage (JPV) signals from the illuminated area and outside this area for calibration and test wafers at different light modulation frequencies, p-n junction sheet resistance and conductance (leakage current density) are determined.

REFERENCES:
patent: 4812756 (1989-03-01), Curtis et al.
patent: 4902967 (1990-02-01), Flesner
patent: 5442297 (1995-08-01), Verkuil

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