Non-contact force microscope having a coaxial cantilever-tip con

Details Non-contact force microscope having a coaxial cantilever-tip con Non-contact force microscope having a coaxial cantilever-tip con

1994-05-12

1996-04-23

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

055093000

ABSTRACT:
The present invention comprises a highly sensitive non-contact force microscope having a coaxial cantilever-tip configuration and a method of forming such configuration. The non-contact microscope obtains high resolution graphical images of a sample surface topography, and/or other properties thereof including its electrostatic, magnetic, or Van der Waals forces.

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patent: 5359879 (1994-11-01), Oliver et al.
patent: 5371365 (1994-12-01), Watanabe et al.

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