Non-catalytic synthesis of silicon oxynitride

Details Non-catalytic synthesis of silicon oxynitride Non-catalytic synthesis of silicon oxynitride

1975-10-21

1977-05-03

Meros, Edward J.

Chemistry of inorganic compounds

Silicon or compound thereof

Oxygen containing

106 55, C01B 2106

Patent

active

040215296

ABSTRACT:
Silicon oxynitride, Si.sub.2 ON.sub.2 is made, without the need for a catalyst such as CaO, by heating a mixture of powdered silica and silicon in an inert atmosphere at a temperature below the melting point of silicon, and subsequently nitriding the mixture to form silicon oxynitride with minimal silicon nitride contamination.

REFERENCES:
patent: 2636828 (1953-04-01), Nicholson
patent: 3639101 (1972-02-01), Washburn
Guzman et al., "Synthesis of Silicon Oxynitride", Ogneupory, No. 3, Mar. 1970, pp. 177-182.
Goursat et al., "Rev. Int. Temper. et Refract", 1971, t. 8, No. 2, pp. 149-154.

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