Non-Aminic photoresist adhesion promoters for microelectronic ap

Details Non-Aminic photoresist adhesion promoters for microelectronic ap Non-Aminic photoresist adhesion promoters for microelectronic ap

1995-11-27

1997-12-30

Dudash, Diana

Coating processes

Applying superposed diverse coating or coating a coated base

Synthetic resin coating

427255, 4272554, 4272556, 427294, 427387, 4274072, 427409, B05D 136, B05D 304, B05D 500

Patent

active

057027676

ABSTRACT:
A method for providing an inorganic substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.

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