Nitrogen-filling system

Details Nitrogen-filling system Nitrogen-filling system

2006-03-28

2006-03-28

Maust, Timothy L. (Department: 3751)

Fluent material handling, with receiver or receiver coacting mea

Combined

C141S069000, C141S088000, C141S089000, C141S091000, C141S231000

Reexamination Certificate

active

07017627

ABSTRACT:
A nitrogen-filling system is provided. A nitrogen-filling system includes a carrier including a main body for carrying at least one wafer box having at least a wafer, and a closing cover mounted on the carrier main body so as to formed a closed space around the wafer box, and a transporting vehicle for carrying the carrier and a nitrogen-filling apparatus set there on for filling the closed space with nitrogen so as to enhance a stability of the wafer in the carrier.

REFERENCES:
patent: 5810062 (1998-09-01), Bonora et al.
patent: 5879458 (1999-03-01), Roberson et al.
patent: 6467626 (2002-10-01), Misaka

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