Nitrided valve metal material and method of making same

Details Nitrided valve metal material and method of making same Nitrided valve metal material and method of making same

2008-01-29

2008-01-29

Lebentritt, Michael (Department: 2812)

Metal working

Barrier layer or semiconductor device making

Barrier layer device making

C257SE21008

Reexamination Certificate

active

11602150

ABSTRACT:
Valve metal material, including a valve metal, a nitride layer located on the valve metal, and an oxide layer located on the nitride layer is described. Methods of forming such a valve metal material are also described. The method includes forming an oxide layer onto the valve metal and then forming a nitride layer between the oxide layer and the valve metal.

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