Nitride semiconductor laser chip and fabrication method thereof

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S054000

Reexamination Certificate

active

07995632

ABSTRACT:
In a nitride semiconductor laser chip so structured as to suppress development of a step on nitride semiconductor layers, the substrate has the (1-100) plane as the principal plane, the resonator facet is perpendicular to the principal plane, and, in the cleavage surface forming the resonator facet, at least by one side of a stripe-shaped waveguide, an etched-in portion is formed as an etched-in region open toward the surface of the nitride semiconductor layers.

REFERENCES:
patent: 6737678 (2004-05-01), Kawakami et al.
patent: 2001/0030328 (2001-10-01), Ishida
patent: 2001/0048114 (2001-12-01), Morita et al.
patent: 2005/0116243 (2005-06-01), Mochida
patent: 2007/0121692 (2007-05-01), Kawakami et al.
patent: 62-190892 (1987-08-01), None
patent: 08-213692 (1996-08-01), None
patent: 10-051029 (1998-02-01), None
patent: 2007-180522 (2007-07-01), None

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