Nitride etch bath

Details Nitride etch bath Nitride etch bath

1983-05-23

1984-10-09

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156627, 159 28R, B44C 122, C03C 1500, C03C 2506

Patent

active

044759770

ABSTRACT:
A nitride etch bath having an inner vessel encapsulated within an outer housing with an electric heating element sandwiched therebetween. A condensing collar is heat sealed about the top of the inner vessel and supports a condensing lid hinged to the collar. The condensing lid includes an array of enclosed channels and canals in the top and bottom of the lid for transporting a condensing medium. As acid is boiled in the inner vessel, hot acid water vapors rise and impact the condenser lid which condenses the vapors to a liquid utilizing the condensing medium to cool the lid surface. The condenser lid and collar seal the inner vessel to prevent vapor leakage.

REFERENCES:
patent: 4302273 (1981-11-01), Howard
patent: 4390396 (1983-06-01), Koblenzer

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