Nitride compound semiconductor element

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction

Reexamination Certificate

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C257S011000, C257S014000, C257S015000, C257S020000, C257S024000, C257S051000, C257S066000, C257S067000, C257S069000, C257S070000, C257S075000, C257S094000, C257S096000, C257S097000, C257S101000, C257S102000, C257S103000, C257S184000, C257S189000, C257S615000

Reexamination Certificate

active

10773297

ABSTRACT:
A nitride compound semiconductor element having improved characteristics, productivity and yield. A nitride compound semiconductor element includes: a sapphire substrate; a first single crystalline layer of AlN formed on said sapphire substrate; a second single crystalline layer formed on said first single crystalline layer, said second single crystalline layer being made of AlxGa1-xN (0.8≦x≦0.97) and having a thickness of equal to or more than 0.3 μm and equal to or less than 6 μm; and a device structure section of a nitride semiconductor formed on said second single crystalline layer.

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