Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Compound semiconductor
Reexamination Certificate
2011-01-18
2011-01-18
Smith, Bradley K (Department: 2894)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Compound semiconductor
C438S478000
Reexamination Certificate
active
07871845
ABSTRACT:
Provided is a nitride-based semiconductor light emitting device having increased efficiency and power characteristics and method of manufacturing the same. The method may include forming a sacrificial layer on a substrate, forming a passivation layer on the sacrificial layer, forming a plurality of masking dots of a metal nitride on the passivation layer, laterally epitaxially growing a nitride-based semiconductor layer on the passivation layer using the masking dots as masks, forming a semiconductor device on the nitride-based semiconductor layer, and wet etching the sacrificial layer to separate and/or remove the substrate from the semiconductor device.
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Jin Sung-ho
Kim Kyoung-Kook
Lee Jeong-wook
Yoon Suk-ho
Harness & Dickey & Pierce P.L.C.
Samsung LED Co., Ltd.
Smith Bradley K
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