Nitrated polymers as positive resists

Details Nitrated polymers as positive resists Nitrated polymers as positive resists

1975-09-26

1977-01-18

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

96 362, 96115R, 427273, B05D 306

Patent

active

040040437

ABSTRACT:
Positive resists are made using polymers and copolymers of methacrylic acid, methacrylic anhydride, methyl methacrylate, methacrylimide, and N-alkyl-methacrylimides which have been nitrated in up to about 10% of the monomer units on the methyl groups branching off the polymer chain. Inclusion of the nitro groups results in an increase of over an order of magnitude in the speed of development of images when the polymers are used as positive resists.

REFERENCES:
patent: 3535137 (1970-10-01), Haller et al.
patent: 3849137 (1974-11-01), Barzynski et al.
patent: 3885964 (1975-05-01), Nacci

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