Nickel-coated free-standing silicon carbide structure for...

Details Nickel-coated free-standing silicon carbide structure for... Nickel-coated free-standing silicon carbide structure for...

2007-11-20

2007-11-20

Williams, Hezron E. (Department: 2856)

Measuring and testing

Gas analysis

C073S023400, C073S031060

Reexamination Certificate

active

10784606

ABSTRACT:
A (MEMS)-based gas sensor assembly for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. Such gas sensor assembly in a preferred embodiment comprises a free-standing silicon carbide support structure having a layer of a gas sensing material, preferably nickel or nickel alloy, coated thereon. Such gas sensor assembly is preferably fabricated by micro-molding techniques employing sacrificial molds that are subsequently removable for forming structure layers.

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