NF3 production reactor

Details NF3 production reactor NF3 production reactor

2006-10-31

2006-10-31

Langel, Wayne A. (Department: 1754)

Chemistry of inorganic compounds

Nitrogen or compound thereof

Binary compound

C422S225000

Reexamination Certificate

active

07128885

ABSTRACT:
A process for the production of nitrogen trifluoride by reacting fluorine gas and liquid ammonia acid fluoride in a first reaction zone having a relatively low energy input followed by treatment of the resulting reaction product in a second reaction zone having a relatively high energy input. The resulting crude nitrogen trifluoride product may be further treated with fluorine gas under elevated temperatures to improve yield of the desired product.

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