Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1986-05-05
1987-05-05
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
156643, 156646, 204298, 219121PU, C23F 102, B44C 122
Patent
active
046629777
ABSTRACT:
A plasma gun is described which is capable of creating and directing a plasma towards a neutralizing plate. The plate is comprised of a material which is chemically inert, metallic, and whose atoms are substantially heavier than the atoms of the plasma gas. The plasma, upon impacting the neutralizing plate, picks up sufficient electrons to cause the ions to revert to their neutral state. The particles, upon hitting the neutralizing plate, are redirected towards a substrate whose surface is to be altered or eroded. A potential may be applied to the neutralizing plate to enable the energy of the reflected particles to be controlled. The neutral atoms, so redirected, provide a desired anisotropic erosion capability.
REFERENCES:
patent: 4233109 (1980-11-01), Nishizawa
patent: 4541890 (1985-09-01), Cuomo et al.
patent: 4609428 (1986-09-01), Fujimura
Cohen Samuel A.
Langer William D.
Manos Dennis M.
Motley Robert W.
Koffsky David N.
Powell William A.
University Patents Inc.
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