Neural network for determining the endpoint in a process

Details Neural network for determining the endpoint in a process Neural network for determining the endpoint in a process

2008-07-22

2008-07-22

Holmes, Michael B (Department: 2129)

Data processing: artificial intelligence

Neural network

Learning task

Reexamination Certificate

active

11646205

ABSTRACT:
There is provided a system and method for pattern recognition of an endpoint curve for a dry etch process. The system trains a neural network with a group of training curves corresponding to the dry etch process, wherein the training curves contain normal and abnormal features. The system receives an endpoint curve at the neural network representing a dry etch process and detects an abnormal feature in the endpoint curve.

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