Negatively operating photoresist composition, with radiation-abs

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430196, 430197, 430325, G03C 160, G03C 170, G03C 171

Patent

active

047627670

ABSTRACT:
New aminoazobenzene derivatives of the general formula I ##STR1## in which R and R' independently of one another denote hydrogen, alkyl with up to 4 C atoms or halogen,

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