Negative-working radiation-sensitive mixtures containing cyclize

Details Negative-working radiation-sensitive mixtures containing cyclize Negative-working radiation-sensitive mixtures containing cyclize

1991-02-04

1993-04-27

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430196, 430197, 430272, 430277, 430278, 430325, G03F 7012, G03C 1695

Patent

active

052061108

ABSTRACT:
A negative-working, radiation-sensitive composition comprising an admixture in a solvent of:

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patent: 4789619 (1988-12-01), Ruckert et al.
Housley et al. "Dyes in Photoresists: Today's View" Semiconductor International, Apr. 1988, pp. 142-144.

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