Negative photosensitive polyimide polymer and uses thereof

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From carboxylic acid or derivative thereof

Reexamination Certificate

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Details

C528S170000, C528S172000, C528S173000, C528S174000, C528S188000, C528S189000, C430S283100, C430S325000, C525S420000

Reexamination Certificate

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07989578

ABSTRACT:
The present invention relates to a negative photosensitive polyimide polymer having a repeating unit of formula (1) as a polymerized unit:wherein G, Q and P* are as defined in the specification. The polyimide polymer of the present invention is developable in an aqueous alkaline solution, and has the properties associated with an insulating layer and photoresist.

REFERENCES:
patent: 6010825 (2000-01-01), Hagen et al.
patent: 6610815 (2003-08-01), Hata et al.

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