Radiant energy – Ion generation – Field ionization type
Patent
1994-07-27
1995-11-14
Hannaher, Constantine
Radiant energy
Ion generation
Field ionization type
250423F, 250299, H01J 2702, H01J 2726
Patent
active
054669413
ABSTRACT:
A negative ion beam source includes a heated refractory metal ribbon which is positioned adjacent a beam forming electrode that is, biased to repel positive ions emitted from the metal ribbon. An extraction electrode is juxtaposed to the beam forming electrode and includes an aperture for passing a beam of positive ions generated by the metal ribbon. The extraction electrode includes a cesium chamber with openings that are directed towards the refractory metal ribbon. A heater heats the cesium chamber and causes it to expel cesium neutrals towards a surface of the refractory metal ribbon where the cesium neutrals are ionized to positively charged cesium ions. A target is displaced to one side of a perpendicular from the surface of the refractory metal ribbon and is positioned adjacent a negative ion beam forming electrode that is biased to attract the cesium ion beam and to repel negative ions produced by cesium ion bombardment of the target. A negative ion extraction electrode is positioned to another side of the perpendicular line and is biased to repel the cesium ion beam and to attract and pass negative ions formed by bombardment of the target.
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Hannaher Constantine
Tyler Virgil O.
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