Needle assembly of probe card

Details Needle assembly of probe card Needle assembly of probe card

2005-07-26

2005-07-26

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754090

Reexamination Certificate

active

06922069

ABSTRACT:
A needle assembly of probe card includes a plate and needles formed therein for enhancing an assembly characteristic and productivity and increasing an exact and reliable characteristic test. The plate is provided with holes that are formed with an insulating film on an inner side surface thereof. One side end surface of the needle adheres on an inner side surface of the hole, another side end surface thereof is spaced from an inner side surface of the hole, and a vertical thickness of the other side of the hole is formed thinner than the plate so as to have a space in which the other side can vertically move upwardly and downwardly. The plate and the needle are integrated.

REFERENCES:
patent: 4961052 (1990-10-01), Tada et al.
patent: 5172050 (1992-12-01), Swapp
patent: 5555422 (1996-09-01), Nakano
patent: 6114864 (2000-09-01), Soejima et al.
patent: 6507204 (2003-01-01), Kanamaru et al.
patent: 6696849 (2004-02-01), Ban et al.
patent: 6724204 (2004-04-01), Cho et al.

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