Coating processes – Direct application of electrical – magnetic – wave – or... – Electromagnetic or particulate radiation utilized
Patent
1993-09-30
1995-01-17
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Electromagnetic or particulate radiation utilized
4271263, 20429802, 20419226, B05D 306, B05D 506
Patent
active
053824571
ABSTRACT:
A method for sputtering atoms from a target made of a group II metal using a laser is provided. A sputter target and substrate are located in a vacuum chamber. The laser frequency is chosen to be near-resonant with an electronic transition in the group II metal from a ground state to an excited metastable state. As the sputtered atoms leave the target surface, the near-resonant laser energy excites the sputtered atoms. The excited atoms are sputtered into an ambient of molecules containing group VI atoms in the vacuum chamber where they react to form a II-VI compound that deposits on the substrate.
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Colorado Seminary
King Roy V.
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