Near planar native-oxide VCSEL devices and arrays using convergi

Details Near planar native-oxide VCSEL devices and arrays using convergi Near planar native-oxide VCSEL devices and arrays using convergi

1997-08-15

1999-04-20

Bovernick, Rodney

Coherent light generators

Particular active media

Semiconductor

372 96, 372 50, 438 34, H01S 319, H01S 308, H01L 2120

Patent

active

058964088

ABSTRACT:
A VCSEL with a near planar top surface on which the top electrode is deposited. A VCSEL according to the present invention includes a top electrode, a top mirror having a top surface, a light generation region, and a bottom mirror for reflecting light toward the top mirror. At least one of the mirrors includes a plurality of planar electrically conducting layers having different indices of refraction. In addition, at least one of the layers includes an oxidizable material. To expose this layer to an oxidizing agent (thereby converting the material to an electrical insulator), three or more holes are etched down from the top surface of the VCSEL to the layer containing the oxidizable material. The oxidizing agent is then introduced into the top of these holes. The partial oxidation of the layer converts the layer to one having a conducting region surrounded by an electrically insulating region, the conducting region being positioned under the top electrode.

REFERENCES:
patent: 5359618 (1994-10-01), Lebby et al.
patent: 5373522 (1994-12-01), Holonyak, Jr. et al.
patent: 5493577 (1996-02-01), Choquette et al.
patent: 5719891 (1998-02-01), Jewell
patent: 5719892 (1998-02-01), Jiang et al.

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