Near-field X-ray fluorescence microprobe

Details Near-field X-ray fluorescence microprobe Near-field X-ray fluorescence microprobe

2006-08-22

2006-08-22

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Source

Target

C378S046000, C378S049000, C977S863000, C977S950000

Reexamination Certificate

active

07095822

ABSTRACT:
This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.

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patent: 6798863 (2004-09-01), Sato
patent: 2003/0025075 (2003-02-01), Zaluzec
patent: 2005/0220266 (2005-10-01), Hirsch

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