Near-field scanning optical microscope using a fluorescent probe

Details Near-field scanning optical microscope using a fluorescent probe Near-field scanning optical microscope using a fluorescent probe

1991-01-10

1992-04-14

Lee, John D.

Optical: systems and elements

Compound lens system

Microscope

25022714, 2504581, 385 12, 385125, G02B 2106

Patent

active

051053055

ABSTRACT:
A novel probe, useful for near-field optical scanning microscopy, is provided. The probe has a fine tip which includes fluorescent material. In one embodiment, the invention is an apparatus which includes such a probe, means for exciting and detecting fluorescence in the probe tip, means for positioning the probe tip near the surface of a sample, and means for displacing the probe tip relative to the sample. In a second embodiment, the invention is a manufacturing method in which the novel probe is used to measure a characteristic dimension of a patterned workpiece.

REFERENCES:
patent: 4577109 (1986-03-01), Hirschfeld
patent: 4712865 (1987-12-01), Hsu et al.
patent: 4746179 (1988-05-01), Dahne et al.
patent: 4917462 (1990-04-01), Lewis et al.
patent: 4919891 (1990-04-01), Yafuso et al.
patent: 4974929 (1990-12-01), Curry
patent: 4999306 (1991-03-01), Yafuso et al.
patent: 5001051 (1991-03-01), Miller et al.

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