Optical: systems and elements – Lens – With light limiting or controlling means
Patent
1999-04-01
2000-04-18
Epps, Georgia
Optical: systems and elements
Lens
With light limiting or controlling means
25022711, 25022723, 25022734, 359656, 385 5, 385 12, 385 13, 385 31, G02B 900, G02B 600, G10J 104
Patent
active
060522380
ABSTRACT:
A metallic film has apertures located therein in an array arranged in a pattern so that when light is incident on the apertures, surface plasmons on the metallic film are perturbed resulting in an enhanced transmission of the light emitted from individual apertures in the array. The aperture array is used: to filter light of predetermined wavelength traversing the apertures, to collect light over a distance after traversing the apertures, to improve operation of near-field scanning optical microscopes, and to enhance light transmission through masks useable in photolithography.
REFERENCES:
patent: 3866037 (1975-02-01), Simpson
patent: 4360273 (1982-11-01), Thaxter
patent: 4405238 (1983-09-01), Grobman et al.
patent: 4411013 (1983-10-01), Takasu et al.
patent: 4659429 (1987-04-01), Isaacson et al.
patent: 4662747 (1987-05-01), Isaacson et al.
patent: 4815854 (1989-03-01), Tanaka et al.
patent: 4891830 (1990-01-01), Iwahashi
patent: 5250812 (1993-10-01), Murai et al.
patent: 5306902 (1994-04-01), Goodman
patent: 5351127 (1994-09-01), King et al.
patent: 5354985 (1994-10-01), Quate
patent: 5451980 (1995-09-01), Simon et al.
patent: 5570139 (1996-10-01), Wang
patent: 5633972 (1997-05-01), Walt et al.
patent: 5663798 (1997-09-01), Karrai
patent: 5789742 (1998-08-01), Wolff
patent: 5933233 (1999-08-01), Gunther
Bethe, H. A., "Theory of Diffraction by Small Holes," The Physical Review, vol. 66, Nos. 7 and 8, pp. 163-182 (Oct. 1944).
Caldwell, M. E. et al., "Surface-plasmon spatial light modulators based on liquid crystal," Applied Optics, vol. 31, No. 20, pp. 3880-3891 (Jul. 1992).
Chown, M., "Tight fit," New Scientist, No. 2121 (Feb. 1998).
Cowan, J. J., "Aztec surface-relief volume diffractive structure," Journal of the Optical Society of America, vol. 7, No. 8, pp. 1529-1544 (Aug. 1990).
Ebbesen, T.W. et al., "Extraordinary optical transmission through sub-wavelength hole arrays," Nature, vol. 391, pp. 667-669 (Feb. 1998).
Evans, A. F. et al., "Measurement of the electrically induced refractive index change in silicon for wavelength .lambda.=1.3 .mu.m using a Schottky diode," Applied Physics Letters, vol. 56, No. 3, pp. 212-214 (Jan. 1990).
Haginoya, C. et al., "Nanostructure array fabrication with a size-controllable natural lithography," Applied Physics Letters, vol. 71, No. 20, pp. 2934-2936 (Nov. 1997).
Lezec, H., "Light Squeeze," Science NOW (Feb. 11, 1998).
Ghaemi, H. F. et al., "Surface plasmons enhance optical transmission through subwavelength holes," Physical Review B, vol. 58, No. 11, pp. 6779-6782 (Sep. 1998).
Raether, H., Surface Plasmons on Smooth and Rough Surfaces and on Gratings, Springer-Verlag, pp. 1-136 (1998).
Sambles, R., "More than transparent", Nature, vol. 391, pp. 641-642 (Feb. 1998).
Ordal, M. A. et al., "Optical properties of the metals Al, Co, Cu, Au, Fe, Pb, Ni, Pd, Pt, Ag, Ti and W in the infrared and far infrared," Applied Optics, vol. 22, No. 7, pp. 1099-1119 (Apr. 1983).
Solgaard, O. et al., "High frequency attenuated total internal reflection light modulator," Applied Physics Letters, vol. 61, No. 21, pp. 2500-2502 (Nov. 1992).
Van Belle, M., "Photons Squeeze Through Tiny Holes," Photonics Spectra, pp. 36-37 (May 1998).
Villeneuve, P. R., "Light beats the diffraction limit," Physics World, pp. 28-29 (Apr. 1998).
Wang, Y., "Voltage-induced color-selective absorption with surface plasmons," Applied Physics Letters, vol. 67, No. 19, pp. 2759-2761 (Nov. 1995).
Weber, W. H. et al., "Optical electric-field enhancement at a metal surface arising from surface-plasmon excitation," Optics Letters, vol. 6, No. 3, pp. 122-124 (Mar. 1981).
Boardman, A.D. (ed.), Electromagnetic Surface Modes, Wiley-Interscience Publication, pp. 1-76, 661-724 (1982).
Wood, R. W., "Anomalous Diffraction Gratings," Physical Review, vol. 48, pp. 928-936 (Dec. 1935).
Wood, R. W., "On a Remarkable Case of Uneven Distribution of Light in a Diffraction Grating Spectrum," Philosophical Magazine, vol. 4, pp. 396-403 (Jun. 1902).
Yeatman, E. M. et al., "Spatial light modulation using surface plasmon resonance," Applied Physics Letters vol. 55, No. 7, pp. 613-615 (Aug. 1989).
"Flooding light through tiny holes," Science News, vol. 153, No. 9 (Feb. 1998).
"Startling Amount of Light Gets Through Tiny Holes," John Wiley & Sons (1998).
Botten, L.C. et al., "Inductive Grids in the Resonant Region: Theory and Experiment," International Journal of Infrared and Millimeter Waves, vol. 6, No. 7, pp. 511-575 (1985).
Ulrich, R., "Far-Infrared Properties of Metallic Mesh and Its Complementary Structure," Infrared Physics, vol. 7, pp. 37-55 (1967).
John, S., "Localization of Light", Physics Today, p. 32 (May 1991).
Yablonivitch, E. et al., "Hope for Photonic Bandgaps," Nature, vol. 351, p. 278 (1991).
Dalichaouch, R. et al., "Microwave Localization by Two-Dimensional Random Scattering," Nature, vol. 354, pp. 53-55 (1991).
Joannopoulus, J.D. et al., Photonic Crystals, Princeton University Press, pp. 4-7 (1995).
Haroche, S. et al., "Cavity Quantum Electrodynamics," Physics Today, pp. 24-30 (Jan. 1989).
Betzig, E. et al., "Near-Field Optics: Microscopy, Spectroscopy and Surface Modification Beyond the Diffraction Limit," Science, vol. 189, pp. 189-194 (1992).
Born, M. et al, Principles of Optics, Pergamon Press, pp. 401-409 (1980).
Ritchie, R.H. et al., "Surface-Plasmon Resonance Effect in Grating Diffraction," Physical Review Letters, vol. 21, No. 22, pp. 1530-1553 (1968).
Chen, Y.J. et al., "Surface Plasmons on Gratings: Coupling in the Minigap Regions," Solid State Communications, vol. 46, No. 2, pp. 95-99 (1983).
Kitson, S.C. et al., "Full Photonic Band Gap for Surface Modes in the Visible," Physical Review Letters, vol. 77, No. 13, pp. 2670-2673 (1996).
Lochbihler, H. et al., "Surface Polaritons on Gold-Wire Gratings," Physical Review B, vol. 50, No. 7, pp. 4795-4801 (1994).
Drexehage, K.H., "Interaction of Light with Monomolecular Dye Layers," Progress in Optics, vol. 12, pp. 165-232 (1974).
Roberts, A., "Near-zone fields behind circular apertures in thick, perfectly conducting screens," Journal of Applied Physics, vol. 65, No. 8, pp. 2896-2899 (1989).
Roberts, A., "Small-hole coupling of radiation into a near-field probe," Journal of Applied Physics, vol. 70, No. 8, pp. 4045-4049 (1991).
Wessel, J., "Surface-enhanced optical microscopy," Journal of the Optical Society of America B, vol. 2, No. 9, pp. 1538-1541 (1985).
Fischer, U., "Submicrometer aperture in a thin metal film as a probe of its microenvironment through enhanced light scattering and fluorescence", Journal of the Optical Society of America B, vol. 3, No. 10, pp. 1239-1244, (1986).
Specht, M. et al., "Scanning plasmon near-field microscope," Physical Review Letters, vol. 68, No. 4, pp. 476-497 (1992).
Ulrich, R., "Interference Filters for the Far Infrared," Applied Optics, vol. 7, No. 10, pp. 1987-1996 (1968).
Sakai, K. et al., "Metallic Mesh Bandpass Filters and Fabry-Perot Interferometer for the Far Infrared," Japanese Journal of Applied Physics, vol. 8, No. 8, pp. 1046-1055 (1969).
Renk, K.F. et al., "Interference Filters and Fabry-Perot Interferometers for the Far Infrared", Applied Optics, vol. 1, No. 5, pp. 643-648 (1962).
Garg, R.K. et al, "Far-infrared characteristics of multi-element interference filters using different grids," Infrared Physics, vol. 18, pp. 292-298 (1978).
Chase, S.T. et al., "Resonant array bandpass filters for the far infrared," Applied Optics, vol. 22, No. 1, pp. 1775-1779 (1983).
Larsen, T., "A Survey of the Theory of Wire Grids," IRE Transactions on Microwave Theory & Techniques, pp. 191-201 (1962).
Grupp, D.E. et al., "Beyond the Bethe Limit: Tunable Enhanced Light Transmission Through a Single Sub-Wavelength Aperture," Advanced Materials, vol. 11, No. 10, pp. 860-862 (1999).
U.S. application No. 09/168,265, Kim et al., filed Oct. 8, 1998.
U.S. application No. 09/208,116, Ebbesen et al., Dec. 9, 1998.
U.S. application No. 09/435,132, Kim et al., filed Nov. 5, 1999.
Ebbesen Thomas W.
Ghaemi Hadi F.
Thio Tineke
Wolff Peter A.
Epps Georgia
Feig Philip J.
Isztwan Andrew G.
NEC Research Institute Inc.
Spector David N.
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