Near-field scanning optical microscope

Details Near-field scanning optical microscope Near-field scanning optical microscope

1997-12-02

1999-11-30

Nelms, David

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, 250307, 73105, G02B 2100

Patent

active

059946911

ABSTRACT:
A near-field scanning optical microscope is constructed so that a probe is placed close to a surface of a specimen and while the surface of the specimen is scanned with the probe, a region proximate to the surface of the specimen is measured with light. The microscope includes a mechanism for vibrating the probe in a direction nearly perpendicular to the surface of the specimen on scanning; a mechanism for detecting a distance between the surface of the specimen and the probe; and a mechanism for storing signals detected by scanning operation in the direction nearly perpendicular to the surface of the specimen as at least two measured data strings formed in accordance with a sampling table. In this way, the three-dimensional data on the surface of the specimen are acquired.

REFERENCES:
patent: 5418363 (1995-05-01), Elings et al.
patent: 5479024 (1995-12-01), Hillner et al.
patent: 5811796 (1998-09-01), Marchman et al.
Van Hulst et al., "Near-field optical microscopy in transmission and reflection modes in combination with force microscopy", The Royoal Microscopical Society, Journal of Microscopy, vol. 171, Pt. 2, Aug. 1993, pp. 95-104, /NSOM/SURVEY/AFM/.

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