Near field scanning optical microscope

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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250235, H01J 314

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active

053827899

ABSTRACT:
A light source generates probe light to be radiated on a sample. An optical probe has a pin hole at its distal end and selectively supplies the probe light to the sample through the pin hole. An optical detecting unit detects light emerging from the sample and converts it to an electrical signal. The light source generates the probe light whose intensity changes in the pulse-like manner. The optical detecting unit detects the light emerging from the sample in synchronism with an increase in probe light which changes in the pulse-like manner and converts it to the electric signal. Therefore, noise which is conventionally converted to an electrical signal can be decreased even when the probe light which changes in the pulse-like manner is decreased, and measurement can be performed at a high S/N ratio even if the pin hole diameter is small. As a result, the resolution of a near field scanning optical microscope can be improved.

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