Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
Reexamination Certificate
2006-10-31
2006-10-31
Nghiem, Michael (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Length, distance, or thickness
Reexamination Certificate
active
07130755
ABSTRACT:
Provided is a near-field microscope using a dielectric resonator, which makes it possible to minimize influences by external environments, and to enhance its sensitivity, resolution and function by adjusting the distance between a sample and an apex of a probe. The near-field microscope includes a wave source, a dielectric resonator, a probe, a distance adjusting unit, and a detector. The wave source generates a wave, and a frequency of the wave is adjustable by the wave source. The dielectric resonator propagates the wave from the wave source, and a resonance frequency, impedance, a Q factor and an electromagnetic wave mode of the wave is freely adjustable. The probe scans the wave output from the dielectric resonator on a sample. The distance adjusting unit measures a distance between the probe and the sample and maintains the distance to a predetermined value. The detector detects a wave that propagates through the probe, interacts with the sample and then propagates through the probe and the dielectric resonator.
REFERENCES:
patent: 6194711 (2001-02-01), Tomita
patent: 6532806 (2003-03-01), Xiang et al.
D.E. Steinhauer, et al., Imaging of Microwave Permittivity, and Damage Recovery in (Ba, Sr.) TiO3Thin Films, Applied Physics Letter, vol. 75, No. 20, Nov. 15, 1999, pp. 3180-3182.
Michael Golosovky, et al., Novel Millimeter-Wave Near-Field Resistivity Microscope, Applied Physics Letter, vol. 68, No. 11, Mar. 11, 1996.
Kim Joo Young
Kim Song Hui
Lee Kie Jin
Yang Jong Il
Yoo Hyun Jun
Frommer & Lawrence & Haug LLP
Industry-University Cooperation Foundation Sogang University
Nghiem Michael
Santucci Ronald R.
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