Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1996-06-13
1998-05-05
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
25033913, 356437, G01N 2135
Patent
active
057478082
ABSTRACT:
A miniaturized NDIR gas sensor is manufactured using semiconductor micromachining techniques from a semiconductor material such as Si or GaAs. The NDIR gas sensor comprises an optical waveguide, a light source at one end of the waveguide, at least one light detector at the end of the waveguide opposite the light source, a diffusion type gas sample chamber formed within the waveguide and interposed in the optical path between the light source and light detector so that the light source and light detector are thermally isolated from the gas sample, and a separate bandpass filter interposed between the light source and each light detector. A miniaturized NDIR gas sensor is also provided in which the light source and light detector are located on the same end of the optical waveguide is also provided. Because the NDIR sensor is fabricated out of a semiconductor material, the source driver and signal processing electronics may be added directly to the sensor using integrated circuit fabrication techniques. Particles and smoke and dust may be kept out of the sample chamber by application of a gas permeable membrane over apertures in the sample chamber walls.
REFERENCES:
patent: 4578762 (1986-03-01), Wong
patent: 4694173 (1987-09-01), Wong
patent: 4709150 (1987-11-01), Burough et al.
patent: 5055688 (1991-10-01), Fabinski
patent: 5163332 (1992-11-01), Wong
patent: 5255072 (1993-10-01), Mikasa et al.
patent: 5265470 (1993-11-01), Kaiser et al.
Petersen, Kurt E., Silicon as a Mechanical Material, Proceedings of the IEEE, vol. 70, No. 5, May 1982, pp. 420-456.
Howe, Muller, Gabriel & Trimmer, Silicon Micromechanics: sensors and actuators on a chip, IEEE Spectrum, Jul. 1990, pp. 29-35.
Rosen, Jerome, Machining In The Mirco Domain, Mechanical Engineering, Mar. 1989, pp. 40-46.
Fraden, J., AIP Handbook of Modern Sensors, Physics, Designs & Applications, Chpt. 17 Chemical Sensors, pp. 545-546.
Wong, Jacob, Performance Comparison Among Various Types Of Commercially Available Gas Sensors, Gaztechnology, vol. 1, Apr. 1992, pp. 1-13.
The Infrared Information Analysis (IRIA) Center, Environmental Research Institute of Michigan, The Infrared Handbook: Interference Filters, Optical Matters, Chapter 7, at 103-137, (Wolfe, W., Zislis, G., rev. ed., 3d printing 1989).
Engelhard Sensor Technologies
Hannaher Constantine
LandOfFree
NDIR gas sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with NDIR gas sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and NDIR gas sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-56998