Navigation device employing an electret vibration sensor

Details Navigation device employing an electret vibration sensor Navigation device employing an electret vibration sensor

1997-01-23

1998-10-27

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

73491, G01P 1500

Patent

active

058279652

ABSTRACT:
A vibration sensor includes a substrate (5), a plate-like diaphragm (3) forming a capacitor, and holding means (2), (4), (6) for holding the diaphragm so as to be movable in parallel to the substrate; The diaphragm includes a plurality of flexible displacement portions (3c), (3d) for enabling the supporting portion of the diaphragm to be movable in parallel to the substrate. When vibrations are applied to the vibration sensor, the diaphragm portion of the diaphragm is vibrated and electrostatic capacity formed between the substrate and the diaphragm is changed based on the vibrations. Vibrations are detected on the basis of the change of electrostatic capacity. Since the vibration sensor includes the flexible displacement portions, the diaphragm becomes difficult to be vibrated due to a sound pressure and a vibration detected output can be prevented from being disturbed by the sound pressure.

REFERENCES:
patent: 4930042 (1990-05-01), Wiegand et al.
patent: 5008774 (1991-04-01), Bullis et al.
patent: 5024089 (1991-06-01), Norling
patent: 5115291 (1992-05-01), Stokes

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