Narrow-spectrum laser device

Details Narrow-spectrum laser device Narrow-spectrum laser device

2011-03-08

2011-03-08

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular beam control device

Tuning

C372S055000

Reexamination Certificate

active

07903700

ABSTRACT:
A spectral purity range (E95) of a laser beam output from an amplifying laser device (300) is measured by spectral purity range measuring means. To have the measured spectral purity range (E95) within an allowable range E950±dE95 of a target spectral purity range (E950), discharge timing from a time when discharge is started by an oscillating laser device (100) to a time when discharge is started by the amplifying laser device (300) is controlled, and the spectral purity range (E95) is controlled to be stabilized.

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