Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent
1991-10-18
1993-04-20
Cuchlinski, Jr., William A.
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
374121, 374127, 374130, G01J 500, G01J 558
Patent
active
052036316
ABSTRACT:
A narrow-band pyrometric system measures the temperature of an object (1), such as a semiconductor wafer (1), that is coated with a film (2) having an absorption band. The thermal radiation emitted by the coated object (1) passes through a lens (3) and aperture (4), and then a filter (5). The passband of this filter (5) falls within the absorption band of the film (2). The transmitted radiation is then collected by the radiation detector (6), which measures the intensity. The detected radiation is at a wavelength where the heated object (1) is substantially opaque, and the effect of uncertainties in the emissivity on the temperature measurement is minimized. Thus, a method is provided to coat the object (1) with a film (2) of material having an absorption band encompassing the filter (5) passband, and a thickness sufficiently great that the object (1) appears opaque when viewed through the filter (5). Alternatively, the film (2) material and thickness must be such that the emissivity is constant and accurately known in the passband wavelength region.
REFERENCES:
patent: 2912862 (1959-11-01), Machler et al.
patent: 3245261 (1966-04-01), Buteux et al.
patent: 5009926 (1991-04-01), Fukuda
V. M. Braude et al. "An Instrument for the Contactless Measurement of the Surface Temperature of Glass" Glass and Ceramics (USA) vol. 30 No. 1-2 (Jan.-Feb. 1973) pp. 89-91.
Delfino Michelangelo
Hodul David T.
Berkowitz Edward H.
Cuchlinski Jr. William A.
Varian Associates Inc.
Worth W. Morris
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