Narrow-pitch beam homogenizer

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements

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G02B 2710

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active

056991916

ABSTRACT:
A homogenizer for a laser irradiation apparatus which provides single-pulse homogeneity by using optical components which result in an interference pitch which is smaller than the thermal diffusion length of the target material. Under this invention, the non-uniform heat distribution from a laser beam can be averaged out through thermal diffusion, achieving single-pulse homogeneity.

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