Coherent light generators – Particular active media – Gas
Patent
1998-12-02
2000-02-22
Scott, Jr., Leon
Coherent light generators
Particular active media
Gas
372 98, 372 20, 372 92, 372 19, H01S 322
Patent
active
060288795
ABSTRACT:
A line narrowed laser having a grating based line narrowing module, etalon-based line narrowing output coupler and a technique for tuning the laser. The etalon based output coupler is adjusted to preferentially reflect light at or near the spectral maximum produced by the grating. Substantial improvement in line narrowing results from the amplification in the laser resonance chamber of light at or near the grating spectral maximum which is preferentially reflected by the etalon based output coupler. Several preferred methods are disclosed for tuning the etalon based output coupler to match the wavelength selected by the grating based line narrowing module.
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Cymer Inc.
Jr. Leon Scott
Ross, Esq. John R.
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