Narrow-band laser apparatus

Details Narrow-band laser apparatus Narrow-band laser apparatus

1995-05-30

1996-09-24

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Modulation

372 98, 372 92, 372106, 372102, H01S 310

Patent

active

055598161

ABSTRACT:
A narrow-band laser apparatus comprises an optical resonator including first and second reflectors for reflecting radiation, a laser medium for amplifying radiation in said resonator and an etalon for selecting a given wavelength component from said radiation. A polarizing beam splitter is provided for linearly polarizing said radiation and also for acting as an output coupler. In order to obtain very narrow bandwidth radiation of high intensity, a Faraday rotator is provided for rotating the plane of polarization while maintaining the linear polarization thereby allowing a second wavelength selection element (such as a grating) to be efficiently employed to further narrow the output of the laser.

REFERENCES:
patent: 4985898 (1991-01-01), Furuya et al.
patent: 5150370 (1992-09-01), Furuya et al.
patent: 5325378 (1994-06-01), Zorabedian
H.-J. Sahlert, U. Rebban, P. Lokai & D. Basting "Comparison of 248 nm Line Narrowing Resonator Optics for Deep UV Lithography Lasers," Optical/Laser Microlithography IV, SPIE vol. 1463, 1991, pp. 604-609.

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