Narrow-band laser apparatus

Coherent light generators – Particular resonant cavity – Plural cavities

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372102, 372 98, H01S 3082

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active

051075156

ABSTRACT:
Part of a laser beam, which is generated by a laser tube and reflected by a reflection surface of a high-reflectance mirror to travel while diverging at the predetermined angle, is divided by a dividing mirror. The spectral band width of the divided laser beam is narrowed by an etalon and a diffraction grating. The laser beam with the narrowed spectral band width is reflected by a high-reflectance return mirror, returned to the laser tube, and amplified in the laser tube. The laser beam with the narrowed spectral band width is amplified in substantially the same space within the laser tube where the laser beam was generated.

REFERENCES:
patent: 4985898 (1991-01-01), Furuya et al.
patent: 4991178 (1991-02-01), Wari et al.
IEEE Journal of Quantum Electronics, QE-23, 1458-1460, "Simple Long-Pulse XeCl Laser with Narrow-Line Output"; M. Sugii et al.; Sep. 1987.
The Review of Laser Engineering, 17, 50-57, "High Brightness Excimer Laser Oscillator-Amplifier"; T. Enami et al.; Jan. 1989 (in Japan).
Japanese Journal of Optics, 19, 109-112, "A Spectrally Narrowed KrF Excimer Laser Using a Multimirror Laser Cavity"; Y. Shimada et al.; Feb. 1990.

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