Narrow band excimer laser

Details Narrow band excimer laser Narrow band excimer laser

1997-10-10

1999-11-09

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 60, 372 99, 372 19, 372 20, 372102, H01S 322

Patent

active

059828005

ABSTRACT:
A very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. A prior art burst mode "slug effect" occuring at one gas circulation time after the beginning of a burst of pulses is eliminated by the addition of a minute quantity of oxygen. In a preferred embodiment very narrow bandwidth is achieved by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line narrowing module were replaced with calcium fluoride prisms.

REFERENCES:
patent: 5307364 (1994-04-01), Turner
patent: 5559816 (1996-09-01), Basting et al.
patent: 5668067 (1997-09-01), Arauja et al.
patent: 5708495 (1998-01-01), Pitz et al.

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