Nanowire-based device and method of making same

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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C257S072000, C257SE51021, C257SE33067, C977S724000, C977S762000, C315S111210, C315S128000, C315S149000, C313S361100, C313S231310

Reexamination Certificate

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07609432

ABSTRACT:
A nanoelectromechanical (NEM) device and a method of making same employ a laterally extending nanowire. The nanowire is grown in place from a vertical side of a vertically extending support block that is provided on a horizontal surface of a substrate. The nanowire is spaced from the horizontal surface. The NEM device includes a component that is provided to influence the nanowire.

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patent: 2003/0090190 (2003-05-01), Takai et al.
patent: 2004/0240252 (2004-12-01), Pinkerton et al.
patent: 2007/0170071 (2007-07-01), Suh et al.
patent: 2007/0202673 (2007-08-01), Kim et al.

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