Scanning-probe techniques or apparatus; applications of scanning – Auxiliary means serving to assist or improve the scanning... – Sample handling device or method
Reexamination Certificate
2005-11-22
2010-12-07
Berman, Jack I (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Auxiliary means serving to assist or improve the scanning...
Sample handling device or method
C850S008000, C850S052000, C850S056000, C977S902000, C977S962000, C901S031000
Reexamination Certificate
active
07849515
ABSTRACT:
A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.
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Hashiguchi Gen
Hosogi Maho
Konno Takashi
AOI Electronics Co., Ltd.
Berman Jack I
Crowell & Moring LLP
Ippolito Rausch Nicole
National University Corporation Kagawa University
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