Nanotube and metal composite interconnects

Details Nanotube and metal composite interconnects Nanotube and metal composite interconnects

2008-02-20

2010-11-30

Lee, Eugene (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257SE51040, C977S810000

Reexamination Certificate

active

07843070

ABSTRACT:
Nanotube and metal composite interconnects are generally described. In one example, an apparatus includes an interlayer dielectric (ILD) and one or more interconnect structures coupled to the ILD, the one or more interconnect structures including a composite of metal and one or more nanotubes.

REFERENCES:
patent: 7112472 (2006-09-01), Dubin
patent: 7220671 (2007-05-01), Simka et al.
patent: 7335603 (2008-02-01), Mancevski
patent: 7655548 (2010-02-01), Byrn
patent: 2010/0065820 (2010-03-01), Tombler, Jr.

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