Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2007-10-16
2011-12-20
Gambetta, Kelly M (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
C427S255700
Reexamination Certificate
active
08080280
ABSTRACT:
Methods are described for making nanostructures that are mechanically, chemically and thermally stable at desired elevated temperatures, from nanostructure templates having a stability temperature that is less than the desired elevated temperature. The methods comprise depositing by atomic layer deposition (ALD) structural layers that are stable at the desired elevated temperatures, onto a template employing a graded temperature deposition scheme. At least one structural layer is deposited at an initial temperature that is less than or equal to the stability temperature of the template, and subsequent depositions made at incrementally increased deposition temperatures until the desired elevated temperature stability is achieved. Nanostructure templates include three dimensional (3D) polymeric templates having features on the order of 100 nm fabricated by proximity field nanopatterning (PnP) methods.
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Bogart Gregory R.
Grubbs Robert K.
Rogers John A.
Gambetta Kelly M
Sandia Corporation
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