Coating apparatus – With heat exchange – drying – or non-coating gas or vapor... – With solid heat exchange means contacting work
Reexamination Certificate
2011-04-19
2011-04-19
Silverman, Stanley S. (Department: 1736)
Coating apparatus
With heat exchange, drying, or non-coating gas or vapor...
With solid heat exchange means contacting work
C423S447300, C422S202000
Reexamination Certificate
active
07926440
ABSTRACT:
Apparatus and method for synthesizing nanostructures in a controlled process. An embodiment of the apparatus comprises a stage or substrate holder that is heated, e.g., resistively, and is the primary source of heating for the substrate for nanostructure synthesis. The substrate and substrate heater are enclosed in a chamber, e.g., a metal chamber, which is ordinarily at a lower temperature than are the substrate and substrate heater during synthesis. Some embodiments of the invention are particularly useful for chemical vapor deposition (CVD), low pressure CVD (LPCVD), metal organic CVD (MOCVD), and general vapor deposition techniques. Some embodiments of the present invention allow for in situ characterization and treatment of the substrate and nanostructures.
REFERENCES:
patent: 5059770 (1991-10-01), Mahawili
patent: 5156815 (1992-10-01), Streetman et al.
patent: 6080970 (2000-06-01), Yoshida et al.
patent: 6156382 (2000-12-01), Rajagopalan et al.
patent: 6181055 (2001-01-01), Patterson et al.
patent: 6184498 (2001-02-01), Kiyama
patent: 6232706 (2001-05-01), Dai et al.
patent: 6346189 (2002-02-01), Dai et al.
patent: 6495258 (2002-12-01), Chen et al.
patent: 6676906 (2004-01-01), Heisel
patent: 6692568 (2004-02-01), Cuomo et al.
patent: 2002/0011210 (2002-01-01), Satoh et al.
patent: 2006/0269468 (2006-11-01), Chung et al.
Qin, et al., Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition, Applied Physics Letters 1998; 72(26): 3437-3439.
Lee, et al., Growth and field emission of carbon nanotubes on sodalime glass at 550 C using thermal chemical vapor deposition, Chemical Physics Letters 2001; 337: 398-402.
R. Alexandrescu et al., “Synthesis of Carbon Nanotubes by CO2 laser-assisted Chemical Vapour Deposition,” Infrared Physics & Technology, 44, (2003) 43-50.
F. Rohmund et al., “Carbon Nanotube Films Grown by Laser-assisted Chemical Vapor Deposition,” J. of Vacuum Science and Technology B, vol. 20, No. 3, (2002) 802-11.
P. Finnie et al., “Cold Wall Chemical Vapor Deposition of Single Walled Carbon Nanotubes,” J. of Vacuum Science and Technology A, vol. 22, No. 3, (2004) 747-51.
O. Englander et al., “Local Synthesis of Silicon Nanowires and Carbon Nanotubes on Microbridges,” Applied Physics Letters, vol. 82, No. 26 (Jun. 30, 2003) 4797-4799.
S. Chiashi et al., “Cold Wall CVD Generation of Single-Walled Carbon Nanotubes and In Situ Raman Scattering Measurements of the Growth Stage,” Chemical Physics Letters, 386 (2004) 89-94.
Wei al. “Directed Assembly of Carbon Nanotube Electronic Circuits by Selective Area Chemical Vapor Deposition on Prepatterned Catalyst Electrode Structures,” J. of Vacuum Science and Technology B, 18, (2000), 3586-89.
Avigal, Y. and Kalish, R. “Growth of Aligned Carbon Nanotubes by Biasing During Growth,” Applied Physics Letters, vol. 78, No. 16 (2001) 2291-93.
Lan et al., “Nanohomojunction (GaN) and Nanoheterojunction (InN) Nanorods on One-Dimensional GaN Nanowire Substrates,” Advanced Functional Materials, 14, No. 3 (2004) 233-37.
Kolasa Borys
Lai Jon W.
Lim Brian Y.
Tombler, Jr. Thomas W.
Aka Chan LLP
Etamota Corporation
McCracken Daniel C.
Silverman Stanley S.
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