Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1996-11-25
1998-04-21
Kincaid, Kristine L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
3613212, 361322, 3613211, 29 2542, H01G 406, H01G 420
Patent
active
057424713
ABSTRACT:
A capacitor is formed of at least two metal conductors having a multilayer dielectric and opposite dielectric-conductor interface layers in between. The multilayer dielectric includes many alternating layers of amorphous zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3). The dielectric-conductor interface layers are engineered for increased voltage breakdown and extended service life. The local interfacial work function is increased to reduce charge injection and thus increase breakdown voltage. Proper material choices can prevent electrochemical reactions and diffusion between the conductor and dielectric. Physical vapor deposition is used to deposit the zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3) in alternating layers to form a nano-laminate.
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Barbee, Jr. Troy W.
Johnson Gary W.
Dinkins Anthony
Kincaid Kristine L.
Main Richard B.
Sartorio Henry P.
The Regents of the University of California
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