Nanoscale standard sample and its manufacturing method

Details Nanoscale standard sample and its manufacturing method Nanoscale standard sample and its manufacturing method

2005-12-06

2005-12-06

Wells, Nikita (Department: 2881)

Radiant energy

Calibration or standardization methods

C250S306000, C250S307000, C250S310000, C250S311000

Reexamination Certificate

active

06972405

ABSTRACT:
An indicator indicating the direction of a diffraction grating pattern is provided on a chip so that the direction of the pattern can be accurately determined. The indicator includes an anisotropic shape of the chip and the formation of a marking-off line or a mark on the chip, allowing the direction of the diffraction grating pattern to be determined from the external appearance of the chip. As a result, the chip can be mounted on a sample base while accurately determining the direction of the diffraction grating pattern, thus allowing a calibration operation to be performed accurately and reliably.

REFERENCES:
patent: 6570157 (2003-05-01), Singh et al.
patent: 6573497 (2003-06-01), Rangarajan et al.
patent: 6573498 (2003-06-01), Rangarajan et al.
patent: 8-31363 (1996-02-01), None

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