Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2008-05-02
2011-11-15
Williams, Hezron E (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
08056402
ABSTRACT:
By forming an appropriate material layer, such as a metal-containing material, on a appropriate substrate and patterning the material layer to obtain a cantilever portion and a tip portion, a specifically designed nano-probe may be provided. In some illustrative aspects, additionally, a three-dimensional template structure may be provided prior to the deposition of the probe material, thereby enabling the definition of sophisticated tip portions on the basis of lithography, wherein, alternatively or additionally, other material removal processes with high spatial resolution, such as FIB techniques, may be used for defining nano-probes, which may be used for electric interaction, highly resolved temperature measurements and the like. Thus, sophisticated measurement techniques may be established for advanced thermal scanning, strain measurement techniques and the like, in which a thermal and/or electrical interaction with the surface under consideration is required. These techniques may be advantageously used for failure localization and local analysis during the fabrication of advanced integrated circuits.
REFERENCES:
patent: 5336369 (1994-08-01), Kado et al.
patent: 5929438 (1999-07-01), Suzuki et al.
patent: 6328902 (2001-12-01), Hantschel et al.
patent: 6862921 (2005-03-01), Chand et al.
patent: 7010966 (2006-03-01), Kitazawa et al.
patent: 2002/0024004 (2002-02-01), Shimada et al.
patent: 2002/0152804 (2002-10-01), Shiotani et al.
patent: 2007/0033993 (2007-02-01), Fouchier
patent: 1 748 447 (2007-01-01), None
patent: WO 99/58925 (1999-11-01), None
Translation of Official Communication from German Patent Office for German Patent Application No. 10 2007 052 610.7 dated Nov. 3, 2008.
Gotszalk Teodor
Grabiec Piotr
Hecker Michael
Janus Pawel
Zschech Ehrenfried
Advanced Micro Devices , Inc.
Devito Alex
Williams Hezron E
Williams Morgan & Amerson P.C.
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